ASML Is Raising Prices 10% on Every EUV and DUV Spare Part Sold in South Korea — and Samsung and SK Hynix Have Already Agreed

ASML has told Samsung Electronics and SK Hynix that it will raise prices by 10% on replacement parts for the lithography systems it has already installed in South Korea, according to a report from the Korean semiconductor trade outlet The Elec. The increase covers every part for both extreme ultraviolet (EUV) and deep ultraviolet (DUV) tools, from consumables that fabs buy on a regular schedule to the optical assemblies, light sources and precision motion systems that are swapped out when they fail.

The new prices apply to deliveries starting in January 2027. ASML's Korean subsidiary passed the proposal to both companies in early September, and the increase was finalized after discussions with their purchasing organizations. A blanket 10% increase is unusual for ASML, which has historically adjusted individual part prices only when raw material costs spiked or a specific material became hard to source.

The numbers behind the decision are not small. ASML reports service, parts and upgrades for installed equipment as a separate line, and that business generated EUR 8.193 billion in 2025 — roughly 25% of the company's EUR 32.667 billion in total sales. ASML has said it expects that revenue to grow more than 30% this year, faster than machine sales. "Prices have risen across the board for the components that make up these parts, but ASML also appears to be seeking a larger share of the profits its customers are making," one industry official told The Elec.

Parts are not the end of it. ASML is separately negotiating price increases on new equipment with major customers. The Information reported in July that ASML had notified Chinese chipmakers and other customers of a 10% increase on DUV systems, with some accepting. TSMC, ASML's largest customer, has reportedly pushed back.

What makes the Korean acceptance notable is who folded first. Samsung and SK Hynix are midway through multi-billion-dollar capacity expansions driven by AI data center demand for high-bandwidth memory and conventional DRAM. Lithography parts are a fixed maintenance cost: fabs cannot simply stop buying them, and there is no second supplier for EUV optics. Accepting a 10% increase signals that the bargaining power in this relationship has moved toward the supplier.

Other equipment makers are moving the same way. Applied Materials said during its August earnings that prices had risen on both new and existing products. Tokyo Electron said in late July that it was pursuing price adjustments, including on equipment already in the field. Advanced Energy Industries has raised prices on some plasma power supply lines.

The common driver is a supply-demand inversion. AI infrastructure investment has pushed memory makers and foundries to expand at the same time, and equipment suppliers need time to add capacity. Inflation and raw material costs add to the pressure. For years, chipmakers used purchasing volume to push prices down; that leverage has narrowed.

For the AI buildout, the practical effect is that the cost of keeping advanced fabs running is rising, and those costs travel downstream into HBM and logic wafer pricing. The parts increase also strengthens the hand of every other supplier currently negotiating a price rise — which is exactly the signal ASML's Korean customers just sent by accepting.